Scatterometry

Nanohmics offers scatterometry services for government and industry. Our system measures BRDF for almost any application.

The Air Force Research Lab published a report stating that the Nanohmics system “exceeds” the performance of the AFRL’s own system located at Wright-Patterson AFB.  More information can be found at:

http://www.afsbirsttr.com/Publications/Documents/Innovation-091109-Nanohmics-AF05-002.pdf

In-house instrument for characterization of scattering from surfaces

World-class performance with unique features:

  • Multiple wavelengths (532, 633, 1313 nm, +more)
  • Measures scattering in transmission and/or reflection
  • Detector can measure within 5 mrad (0.3°) of source
  • 5 order of magnitude instantaneous dynamic range
  • Theoretical support (esp. operations with 2D surface power spectrum)

The service includes:

  • Wavelength Setup
  • Sample Setup
  • Sample Data Processing
  • Sample Positioning and Alignment
  • Sample Rotation
  • Sample Angle of Incidence
  • Source/Detector Polarization Adjustment
  • Coarse Scan or Fine Scan

Bistatic, Monostatic and Ellipsometer Scans available